Scanning Probe Lithography

Name: Scanning Probe Lithography
ISBN: 9781032122144

Publisher:: CRC Press LLC
Release Date:: 1 January 2022
Status:: Check Availability
ISBN:: 9781032122144

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Description

Introduces historical background of SPL, including evolution of the technique and tools Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied Shows the different types of devices and structures fabricated by SPL, together with the processing steps Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups Summarizes strengths, limitations, and potential of SPL

ISBN 9781032122144

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